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STREAM Workshop
held in Agrate on 25/01/2002


Here are the slides presented at the STREAM workshop held in STMicroelectronics - Agrate Brianza (Italy). All documents are in PDF format, so you need Adobe Acrobat Reader to be able to read and print them.
You can also look at the Workshop Agenda.

List of the presentations
Technology, process and tested structures
Presentation of the measurements campaignes.
(Gianpietro Carnevale, ST - Agrate)
Brillouin Light scattering
The BLS technique and its application to the elastic characterisation of films.
(Giovanni Carlotti, University of Perugia)
TEM CBED strain measurements
The TEM/CBED technique and its results.
(Aldo Armigliato, CNR-LAMEL)
Software for CBED automation
Software for automatic strain analysis by TEM/CBED.
(Tobias Schilling, SIS)
Micro-Raman measurements
The microRaman technique and its results.
(Ingrid DeWolf, IMEC)
X-ray diffraction
The micro X-ray diffraction technique and its results.
(Stefano Lagomarsino, IESS)
Modelling and simulation
Modelling and simulation of the processes for 0.15 mm technology.
(Vincent Senez, ISEN-IEMN)



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