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STREAM Partner only area STREAM deliverables Deliverable D1 Definition of test structure & process flow. See also in Word format Deliverable D2 Assessment of the TEM/CBED procedure for strain determination. See also in Word format Deliverable D3 Definition of modelling/characterisation actions & interfaces between simulation programs. Deliverable D4 First report on physical characterisation of samples for stress measurements. See also in Word format Deliverable D5 TEM/CBED measurements on test structures (filtered vs. unfiltered). See also in Word format Deliverable D6 Theoretical and experimental study of effects of the different optical parameters and lenses on spatial resolution of the Raman system. See also in Word format Deliverable D7 1st results comparing TEM/CBED measurements & TCAD simulation using numerical models. Deliverable D8 State of the art of stress measurements in silicon. See also in Word format Deliverable D9 2nd report on Physical and electrical characterisation of samples for stress measurements. See also in Word format Deliverable D10 Investigation of different zone axes for TEM/CBED analysis. See also in Word format Deliverable D11 Hardware and sofware set-up for XRD with the necessary characteristics of mechanical precision and stability Deliverable D12, part A 2nd results comparing TEM/CBED measurements and TCAD simulations (both numerical and analytical) including materials characterisation. See also part B. Deliverable D13 Analysis STREAM 0.9, first (beta) version of software for automation of TEM/CBED methodology. See also in Word format Deliverable D14 TEM/CBED software automation tool: 1st evaluation. See also in Word format Deliverable D15 Correlation between TEM/CBED/ measurements, electrical results and simulation: 1st verification. Deliverable D16 3rd report on physical and electrical characterisation of samples for stress measurements. See also in Word format Deliverable D17 MicroRaman measurements on test structures with different dimensions and comparison with TEM/CBED and process simulation. Other documents Deliverable DP01 1st Dissemination and use plan. See also in Word format Deliverable DP02 Mid-term Dissemination and use plan. See also in Word format Deliverable DM0 1st progress report. See also in Word format Deliverable DM1 2nd progress report. See also in Word format Deliverable DM2 3rd progress report. See also in Word format