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STREAM Workshop held in Agrate on 25/01/2002 Here are the slides presented at the STREAM workshop held in STMicroelectronics - Agrate Brianza (Italy). All documents are in PDF format, so you need Adobe Acrobat Reader to be able to read and print them. You can also look at the Workshop Agenda. List of the presentations Technology, process and tested structures Presentation of the measurements campaignes. (Gianpietro Carnevale, ST - Agrate) Brillouin Light scattering The BLS technique and its application to the elastic characterisation of films. (Giovanni Carlotti, University of Perugia) TEM CBED strain measurements The TEM/CBED technique and its results. (Aldo Armigliato, CNR-LAMEL) Software for CBED automation Software for automatic strain analysis by TEM/CBED. (Tobias Schilling, SIS) Micro-Raman measurements The microRaman technique and its results. (Ingrid DeWolf, IMEC) X-ray diffraction The micro X-ray diffraction technique and its results. (Stefano Lagomarsino, IESS) Modelling and simulation Modelling and simulation of the processes for 0.15 mm technology. (Vincent Senez, ISEN-IEMN)