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STREAM Workpackages To achieve the objectives of the proposed project, the work has been divided into eight Workpackages: WP0 Dissemination and implementation WP1 project management WP2 process definition and materials characterisation WP3 stress/strain measurements WP4 technology simulation and modelling WP5 software for automatic determination of the strain tensor from the TEM/CBED patterns WP6 validation of the methodology and feedback WP7 assessment and evaluation The Workpackage WP0 deals with the dissemination and implementation: it will support the preparation of both the dissemination and use plan and of the Technology Implementation Plan (TIP). The Workpackage WP1 deals with the project management. The objective of this co-ordination activity is to maintain a good project management and to prompt communication among the partners and with the EU Commission. It includes all the co-ordination tasks, e.g. project evaluation, planning of meetings and preparation of reports. The Workpackage WP2 deals with the process definition and materials characterisation. It consists of 4 tasks: Task 2.1 Process flow for 0.15 µm CMOS generation and morphological test structure definition. Task 2.2 Morphological sample preparation for stress measurements. Task 2.3 Elastic characterisation of films used in the samples Task 2.4 Electrical characterisation of the different process options. The Workpackage WP3 deals with stress/strain measurements. It consists of 3 tasks: Task 3.1. Strain measurements by TEM/CBED on the 0.15 µm CMOS structures. Task 3.2. Improvement of the microRaman spectroscopy technique for strain determination with submicron resolution. Task 3.3. Development of a synchrtotron-based X-ray diffraction technique for strain determination with submicron resolution. The Workpackage WP4 concerns with the technology simulation and modelling. It consists of three tasks: Task 4.1. Simulation of 0.15 mm CMOS processes. Task 4.2. Modelling actions. Task 4.3. Characterisation of thin films. The Workpackage WP5 is related to the development of a software for automatic determination of the strain tensor from the TEM/CBED patterns. It consist of 4 tasks devoted to: Task 5.1 Acquisition of TEM/CBED patterns Task 5.2. Pattern archiving Task 5.3. Pattern processing Task 5.4. Analysis (best fit procedures to get the strain tensor) The Workpackage WP6 includes the activity of validation of the methodology and feedback. It consists of 3 task: Task 6.1. Evaluation of the main technological steps of the process flow. Task 6.2. Stress models evaluation. Task 6.3. Evaluation of the TEM/CBED software tool The Workpackage WP7 deals with assessment and evaluation. It will consist of all quality assessment and evaluation work to be done within this project.