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STREAM Documents
You find here a list of the public deliverables of the STREAM project. The documents are in PDF format, so you need Adobe Acrobat Reader to be able to read and print them. Some are also available in Word for Windows (97) format.
Public deliverables
- Deliverable D2
- Assessment of the TEM/CBED procedure for strain determination.
- See also in Word format
- Deliverable D4
- First report on physical characterisation of samples for stress
- measurements. See also in Word format
- Deliverable D6
- Theoretical and experimental study of effects of the
- different optical parameters and lenses on spatial
- resolution of the Raman system. See also in Word format
- Deliverable D8
- State of the art of stress measurements in silicon.
- See also in Word format
- Deliverable D10
- Investigation of different zone axes for TEM/CBED analysis.
- See also in Word format
- Deliverable D11
- Hardware and sofware set-up for XRD with the necessary
- characteristics of mechanical precision and stability
- Deliverable D16
- 3rd report on physical and electrical characterisation of samples
- for stress measurements.
- See also in Word format
- Deliverable D17
- MicroRaman measurements on test structures with different
- dimensions and comparison with TEM/CBED and process simulation.
- Deliverable D20
- Evaluation of advantages of 1 nm spatial resolution TEM/FEG technique.
- See also in Word format
- Deliverable D21
- Determination of strain tensor values on test structures with different
- dimensions by XRD and comparison with TEM/CBED, microRS and process
- simulation.
- Deliverable D22
- Last results comparing TEM measurements & TCAD simulation (both numerical and
- analytical) including material characterisation.
- Deliverable D22AnnexI
- See also in Word format
- Deliverable D23
- Analysis STREAM 1.0, final version of software for automation of
- TEM/CBED methodology.
- See also in Word format
- The ASAC software
- ASAC software brochure
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