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You find here a list of the public deliverables of the STREAM project. The documents are in PDF format, so you need Adobe Acrobat Reader to be able to read and print them. Some are also available in Word for Windows (97) format.

Public deliverables
Deliverable D2
Assessment of the TEM/CBED procedure for strain determination.
See also in Word format
Deliverable D4
First report on physical characterisation of samples for stress
measurements. See also in Word format
Deliverable D6
Theoretical and experimental study of effects of the
different optical parameters and lenses on spatial
resolution of the Raman system. See also in Word format
Deliverable D8
State of the art of stress measurements in silicon.
See also in Word format
Deliverable D10
Investigation of different zone axes for TEM/CBED analysis.
See also in Word format
Deliverable D11
Hardware and sofware set-up for XRD with the necessary
characteristics of mechanical precision and stability
Deliverable D16
3rd report on physical and electrical characterisation of samples
for stress measurements.
See also in Word format
Deliverable D17
MicroRaman measurements on test structures with different
dimensions and comparison with TEM/CBED and process simulation.
Deliverable D20
Evaluation of advantages of 1 nm spatial resolution TEM/FEG technique.
See also in Word format
Deliverable D21
Determination of strain tensor values on test structures with different
dimensions by XRD and comparison with TEM/CBED, microRS and process
simulation.
Deliverable D22
Last results comparing TEM measurements & TCAD simulation (both numerical and
analytical) including material characterisation.
Deliverable D22AnnexI
See also in Word format
Deliverable D23
Analysis STREAM 1.0, final version of software for automation of
TEM/CBED methodology.
See also in Word format
The ASAC software
ASAC software brochure



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